SMC Vacuum Valves（Flange Type：KF）

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  Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

  SMC

  A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.[Features]· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)・ Achieves system compactness and piping savings・ Prevents dust from rolling up in the chamber when exhausting・ Adjustable initial exhaust valve flow rate・ Air operated type / with solenoid valve・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer・ Strong against fluorine· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion· Lightweight and compact

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  Air-Actuated Vacuum Valve	Single Use	Direct	2-Port Valve	-	2-Position Normally Closed	-	-	Flange	-	-	KF	25 / 40 / 50 / 63 / 80	-

  Days to Ship: Số ngày giao hàng: 25 Day(s) or more

  25 Day(s) or more

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  Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

  SMC

  Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation. [Features] · Bellows type is particulate-free and cleaned. · Pressure balanced structure. · Body material: SCS13 (SUS304 equivalent). · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  Pilot Vacuum Valve	Single Use	Direct	2-Port Valve	-	2-Position Normally Closed	-	-	Flange	-	-	KF	16 / 25 / 40 / 50 / 63 / 80	-

  Days to Ship: Số ngày giao hàng: 25 Day(s) or more

  25 Day(s) or more

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  Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

  SMC

  [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  Pilot Vacuum Valve	Single Use	Direct	2-Port Valve	-	2-Position Normally Closed	-	-	Flange	-	-	KF	16 / 25 / 40 / 50 / 63 / 80	-

  Days to Ship: Số ngày giao hàng: 25 Day(s) or more

  25 Day(s) or more

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  Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

  SMC

  [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  Pilot Vacuum Valve	Single Use	Direct	2-Port Valve	-	2-Position Normally Closed	-	-	Flange	-	-	KF	16 / 25 / 40 / 50 / 63 / 80	-

  Days to Ship: Số ngày giao hàng: 51 Day(s) or more

  51 Day(s) or more

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  Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

  SMC

  [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  Pilot Vacuum Valve	Single Use	Direct	2-Port Valve	-	2-Position Normally Closed	-	-	Flange	-	-	KF	16 / 25 / 40 / 50 / 63 / 80	-

  Days to Ship: Số ngày giao hàng: 25 Day(s) or more

  25 Day(s) or more

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  Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

  SMC

  [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  High Vacuum Solenoid	Single Use	Direct	2-Port Valve	Single	2-Position Normally Closed	Directly Operated	-	Flange	-	-	KF	16 / 25 / 40 / 50 / 63 / 80	-

  Days to Ship: Số ngày giao hàng: 25 Day(s) or more

  25 Day(s) or more

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  Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

  SMC

  A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded. [Features] · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve). · Allows for compact system designs and reduced piping. · Prevents dust turbulence inside the chamber when exhausting. · Adjustable flow rate for initial exhaust valve. · Air-operated type with solenoid valve. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  High Vacuum Solenoid	Single Use	Direct	2-Port Valve	Single	2-Position Normally Closed	Directly Operated	-	Flange	-	-	KF	25 / 40 / 50 / 63 / 80	-

  Days to Ship: Số ngày giao hàng: 31 Day(s) or more

  31 Day(s) or more

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  Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

  SMC

  A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction. [Features] · Bellows type is particulate-free and cleaned. · Low actuation torque (0.5 N·m or less). · Spring provides a standard sealing load. · Handle height remains the same regardless of whether valve is open or closed. · Equipped as standard with an indicator for confirming if the valve is open or closed. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  Manual Vacuum Valve	Single Use	Direct	2-Port Valve	-	2-Position Normally Closed	-	-	Flange	-	-	KF	16 / 25 / 40 / 50	-

  Days to Ship: Số ngày giao hàng: 32 Day(s) or more

  32 Day(s) or more

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  Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

  SMC

  A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction. [Features] · Bellows type is particulate-free and cleaned. · Low actuation torque (0.5 N·m or less). · Spring provides a standard sealing load. · Handle height remains the same regardless of whether valve is open or closed. · Equipped as standard with an indicator for confirming if the valve is open or closed. · Body material: SCS13 (SUS304 equivalent). · Precision-cast single-piece structure which helps prevent gas accumulation. · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  Manual Vacuum Valve	Single Use	Direct	2-Port Valve	-	2-Position Normally Closed	-	-	Flange	-	-	KF	16 / 25 / 40 / 50	-

  Days to Ship: Số ngày giao hàng: 32 Day(s) or more

  32 Day(s) or more

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  Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

  SMC

  A high vacuum angle valve that requires no air to drive, enabling use in portable equipment. [Features] · Uses no sliding metal parts, minimizing particulate matter. · The pressure balance mechanism allows an unrestricted exhaust direction. · A control power supply circuit for solenoid valve drive is now standard. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  Solenoid Valve	Single Use	Direct	2-Port Valve	Single	2-Position Normally Closed	Directly Operated	-	Flange	-	-	KF	16 / 25	-

  Days to Ship: Số ngày giao hàng: 32 Day(s) or more

  32 Day(s) or more

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  Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

  SMC

  A vacuum valve for preventing pumps from running when overloaded. [Features] · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve) · Allows for compact system designs and reduced piping. · Prevents dust turbulence inside the chamber when exhausting. · Adjustable flow rate for initial exhaust valve. · Body material: SCS13 (SUS304 equivalent). · Precision-cast single-piece structure which helps prevent gas accumulation. · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  Pilot Vacuum Valve	Single Use	Direct	2-Port Valve	-	2-Position Normally Closed	-	-	Flange	-	-	KF	25 / 40 / 50 / 63 / 80	-

  Days to Ship: Số ngày giao hàng: 32 Day(s) or more

  32 Day(s) or more

BrandNhãn hiệu
Product SeriesDòng sản phẩm
CADCAD
From
Days to ShipSố ngày giao hàng
Type
Application
Mounting Orientation
Number of Ports
Solenoid Type
Switching Type
Driving Type
Effective Sectional Area(mm2)
Pipe Port Type
Plumbing Thread Nominal
Connecting Tube Diameter
Flange Type
Flange Nominal
CV Value

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BrandNhãn hiệu	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC
Product SeriesDòng sản phẩm	Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series	Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series	Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series	Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series	Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series	Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve	Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve	Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series	Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)	Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)	Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD
CADCAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D
From	-	-	-	-	-	-	-	-	-	-	-
Days to ShipSố ngày giao hàng	25 Day(s) or more	25 Day(s) or more	25 Day(s) or more	51 Day(s) or more	25 Day(s) or more	25 Day(s) or more	31 Day(s) or more	32 Day(s) or more	32 Day(s) or more	32 Day(s) or more	32 Day(s) or more
Type	Air-Actuated Vacuum Valve	Pilot Vacuum Valve	Pilot Vacuum Valve	Pilot Vacuum Valve	Pilot Vacuum Valve	High Vacuum Solenoid	High Vacuum Solenoid	Manual Vacuum Valve	Manual Vacuum Valve	Solenoid Valve	Pilot Vacuum Valve
Application	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use	Single Use
Mounting Orientation	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct
Number of Ports	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve
Solenoid Type	-	-	-	-	-	Single	Single	-	-	Single	-
Switching Type	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed
Driving Type	-	-	-	-	-	Directly Operated	Directly Operated	-	-	Directly Operated	-
Effective Sectional Area(mm2)	-	-	-	-	-	-	-	-	-	-	-
Pipe Port Type	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange	Flange
Plumbing Thread Nominal	-	-	-	-	-	-	-	-	-	-	-
Connecting Tube Diameter	-	-	-	-	-	-	-	-	-	-	-
Flange Type	KF	KF	KF	KF	KF	KF	KF	KF	KF	KF	KF
Flange Nominal	25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80	25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50	16 / 25 / 40 / 50	16 / 25	25 / 40 / 50 / 63 / 80
CV Value	-	-	-	-	-	-	-	-	-	-	-

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