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XLS-16-5C

type Flange Nominal Voltage Sonic Speed Conductance Electrical Entry Method CE-marked Control Power Supply Yes/No CAD Days to Ship

Specification/DimensionsĐặc điểm kỹ thuật / Kích thướcĐặc điểm kỹ thuật / Kích thước

type
- XLS
- XLS-16
ClearTrống
Flange Nominal
- 16
- 25
ClearTrống
Voltage
- DC24V
- AC100V
- AC200V
ClearTrống
Sonic Speed Conductance
5L/S

8L/S
ClearTrống
Electrical Entry Method
- Conduit
- DIN terminal
- Grommet
- Terminal
ClearTrống
CE-marked
- CE-marked
- None
ClearTrống
Control Power Supply Yes/No
- None
- With control power supply
ClearTrống
CADCAD
- 2D
- 3D
ClearTrống

Days to ShipSố ngày giao hàng

Alltất cả các

32 Day(s) or Less
ClearTrống

Specify AlterationsChỉ định thay đổi

Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) (XLS-16-5C)

Brand :

SMC

Order Qty :
Price :

---
Total Price :

---
Days to ship :

---

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Caution

thận trọng

■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Product Description

A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

Aluminum High Vacuum Angle Valve, Electromagnetic Type, Bellows Pressure Balance, XLS Series Specifications

XLS Series (no control power supply) external appearance

XLS Series (with control power supply) external appearance

Model		XLS-16	XLS-25	XLS-16-P□G	XLS-25-P□G
Valve Type		Normally closed (N.C.)
Fluids		Inert gas vacuum
Operating Temperature (°C)		5 to 40
Operating Pressure Pa (abs)		0.1 MPa (G) to 1 × 10^-6 (abs)
Conductance L/s ^{Note 1:}		5	8	5	8
Amount of leakage Pa·m³/s	Internal	1.3 × 10 ^-8, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	1.3 × 10 ^-11, values at normal temperature and excluding gas permeation
Flange Type and Size		KF16	KF25	KF16	KF25
Main Material ^{Note 2:}		Main body: aluminum alloy, Main parts: stainless steel, PFA, FKM (standard sealing material)
Surface Treatment		External: hard anodized aluminum, Internal: base material
Control Power Supply Yes/No		None		Yes
Operating Power Supply Voltage		24/6, 48/12, 100/24 V DC		24 V DC, 100/200 V AC
Allowable Voltage Fluctuation %		±10
Electrical Entry		G, C, D, T types		G type only
Lead Wire		AWG20, outer diameter: 2.63 mm		VCTF2 × 0.75, outer diameter: 2.3 mm, Sheath outer diameter: 6.6 mm
Coil Insulation Type		Class B
Maximum Operating Frequency (Hz)		0.17
Weight (kg)		0.4	0.7	0.7	1.0

Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: A coating of vacuum grease (Y-VAC3) has been applied to the valve seat section of the vacuum part.

Product Power/Current (When Applying Rated Voltage)

Model			Startup		Holding
Model			Power (W)	Current (A)	Power (W)	Current (A)
XLS-16-	□G/C/D/T, P5G		36	1.5	4.8	0.38
	P1G	50 Hz	30.5	0.47	14.8	0.35
	P1G	60 Hz	30.5	0.47	10	0.27
	P2G	50 Hz	30	0.24	4.9	0.11
	P2G	60 Hz	30	0.24	2.3	0.10
XLS-25-	□G/C/D/T, P5G		47	2.0	5.3	0.5
	P1G	50 Hz	42	0.62	20	0.46
	P1G	60 Hz	42	0.62	13.5	0.36
	P2G	50 Hz	45	0.35	6.7	0.15
	P2G	60 Hz	45	0.35	3.0	0.12

Product Drawing

XLS no control power supply

(Unit: mm)

Grommet (G) dimensional drawing

Conduit (C) dimensional drawing

Terminal (T) dimensional drawing

DIN terminal (D) dimensional drawing

XLS with control power supply

(Unit: mm)

Grommet (G) dimensional drawing

Model	A	B	C	D	E	F	G	J	K	L	M
XLS-16-□G	40	104	113	38	30	35	17	23	-	-	25.5
XLS-16-□C		96							41	-	-
XLS-16-□D									60	48	-
XLS-16-□T			129						95	62	-
XLS-25-□G	50	128.5	138.5	48	40	40	26	25.5	-	-	28
XLS-25-□C		121.5							43	-	-
XLS-25-□D		120.5							63	51	-
XLS-25-□T		121.5	154.5						97	66	-
XLS-16-P□G	40	96	113	38	30	35	17	23	87	66.5	-
XLS-25-P□G	50	121.5	138.5	48	40	40	26	25.5	89.5	69	-

Product Structure/Operation

XLS Series diagram

*Refer to p. 465 of the manufacturer's catalog for maintenance parts.

Working Principle

XLS-□-□□ (no control power supply)
Applying the starting voltage across the coil assembly for approx. 0.15 to 0.2 s opens valve (9). Thereafter, this is held at 25% of the starting voltage. Do not apply the starting voltage for more than 0.3 s as doing so may cause coil burnout. When power to the coil assembly is stopped, valve (9) closes.
XLS-□-P□G (with control power supply)
Applying the rated voltage across the coil assembly opens valve (9). When power to the coil assembly is stopped, valve (9) closes.

*The pressure balance mechanism allows an unrestricted exhaust direction.

Notes

*The body material is A6063, the bellows material is SUS316L, the metal materials used for the other vacuum parts are 13Cr stainless steel, SUS304 and A2017 and the sealing material is FKM. The armature assembly part of the vacuum sections uses a fluorinated resin (PFA). A fluorinated grease coating has been applied to the valve in the vacuum section. Check that the fluid in use will not damage the selected material.
*When there is no operating power supply, the starting voltage is applied for only 0.15 to 0.2 s. After this, a holding voltage (25% of the starting voltage) should be applied. Failure to do this may cause coil burnout or fire.
*Be sure to install a fuse or an earth leakage circuit breaker in the power supply circuit.
*Use within the operating pressure range.
*Refer to the manufacturer's catalog for parts other than those detailed above.

: 30; 45; 60

Part Number
XLS-16-5C

Part Number	Price	Minimum Order Qty.	Volume Discount	Days to ShipSố ngày giao hàng	Flange Nominal	Voltage	Sonic Speed Conductance	Electrical Entry Method	CE-marked	Control Power Supply Yes/No
	-	1 Piece(s)		Quote	16	DC24V	5L/S	Conduit	None	None

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Basic InformationThông tin cơ bản

Type	Solenoid Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Solenoid Type	Single	Switching Type	2-Position Normally Closed
Driving Type	Directly Operated	Pipe Port Type	Flange	Flange Type	KF
Seal Type	Bellows Seal

Please check the type/dimensions/specifications of the part XLS-16-5C in the Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) series.Vui lòng kiểm tra kiểu/kích thước/thông số kỹ thuật của phần XLS-16-5C trong chuỗi Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance).

The specifications and dimensions of some parts may not be fully covered. For exact details, refer toCác thông số kỹ thuật và kích thước của mã sản phẩm có thể không được bao phủ đầy đủ. Để biết chi tiết chính xác, hãy tham khảo manufacturer catalogsdanh mục nhà sản xuất ..

Products like this...

Part Number
XLS-16-5D
XLS-16-5D-Q
XLS-16-5G
XLS-16-5G-Q
XLS-16-5T
XLS-16-5T-Q

Standard Unit Price	Minimum order quantity	Days to ShipSố ngày giao hàng	Flange Nominal	Voltage	Sonic Speed Conductance	Electrical Entry Method	CE-marked	Control Power Supply Yes/No
-	1 Piece(s)	Quote	16	DC24V	5L/S	DIN terminal	None	None
-	1 Piece(s)	Quote	16	DC24V	5L/S	DIN terminal	CE-marked	None
-	1 Piece(s)	Quote	16	DC24V	5L/S	Grommet	None	None
-	1 Piece(s)	Quote	16	DC24V	5L/S	Grommet	CE-marked	None
11,788,000 VND	1 Piece(s)	32 Day(s)	16	DC24V	5L/S	Terminal	None	None
-	1 Piece(s)	Quote	16	DC24V	5L/S	Terminal	-	None

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Điện thoại: 0222-361-1555, e-mail: cs@misumi.com.vn, Mã số doanh nghiệp: 0107514576,
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Specification/DimensionsĐặc điểm kỹ thuật / Kích thướcĐặc điểm kỹ thuật / Kích thước

type

Flange Nominal

Voltage

Sonic Speed Conductance

Electrical Entry Method

CE-marked

Control Power Supply Yes/No

CADCAD