300 mm Wafer Compatible, Parallel Seal Type Slit Valve XGTP Series
:
SMC
- Refer to the manufacturer's catalog for specification and material details.
- The product images are representative only. Please refer to the manufacturer's catalog for shape details.
Parallel seal type slit valve XGTP series.
[Features]
・ Long lifespan: 3 million uses (At normal temperature)
・ Dust generation amount: Reduced to 1/5 or less
・ 22% reduction in air consumption
・ Easy bellows replacement
・ The gate can be replaced from the top
・ Mechanical end lock mechanism adopted